Design and Fabrication of Silica Nanotube Arrays and Nanofluidic Devices
Li D, Yue M, Majumdar A, Fan R, Wu Y, Yang P. Design and Fabrication of Silica Nanotube Arrays and Nanofluidic Devices. 2003, 635-638. DOI: 10.1115/imece2003-43982.Peer-Reviewed Original ResearchSilica nanotube arraysSilica nanotubesNanotube arraysSilicon nanowire templatesNanowire templatesSilicon coreVapor–LiquidDry etch processNanofluidic devicesDry oxidation processNanotubesSilica substrateSiO2 sheathChrome layerGate structureEpitaxial growthTube furnaceEtch processDiameter rangeWire coreM KCl solutionCurrent flowArrayOxidation processDevices