Demystifying metal-assisted chemical etching of GaN and related heterojunctions
Chan C, Menzel J, Dong Y, Long Z, Waseem A, Wu X, Xiao Y, Xie J, Chow E, Rakheja S, Batista V, Mi Z, Li X. Demystifying metal-assisted chemical etching of GaN and related heterojunctions. Applied Physics Reviews 2024, 11: 021416. DOI: 10.1063/5.0186709.Peer-Reviewed Original ResearchReactive ion etchingDevice structureMetal-assisted chemical etchingMechanisms of carrier generationPhotocatalytic reactionAnisotropic etching methodPhotoelectrochemical processesElectrochemical mechanismEnergy-band alignmentPlasma-induced damageElectronic mechanismPower electronicsAnode designPrediction of system behaviorLocal cathodesPassive devicesNano-structuresCarrier generationAnisotropic etchingEtching methodIon etchingSolution chemistryExperimental investigationChemical etchingBandgap materials