Photonic crystal slab biosensors fabricated with helium ion lithography (HIL)
Zhuo Y, Hu H, Wang Y, Marin T, Lu M. Photonic crystal slab biosensors fabricated with helium ion lithography (HIL). Sensors And Actuators A Physical 2019, 297: 111493. DOI: 10.1016/j.sna.2019.07.017.Peer-Reviewed Original ResearchHelium-ion lithographyPhotonic crystal slabCrystal slabIon lithographyFabricating photonic crystal slabsPhotonic crystal biosensorNano-hole patternsPhotonic bandgapDielectric nanostructuresFabricated nano-structuresLabel-free optical biosensorNanoimprint lithographyNanofabrication processHeliumRefractive indexNano-gratingsRefractometric sensorLithographyNano-structuresNano-patternsOptical biosensorsMaster moldFabrication approachSlabBandgap