MEMS micro-coils for magnetic neurostimulation
Liu X, Whalen A, Ryu S, Lee S, Fried S, Kim K, Cai C, Lauritzen M, Bertram N, Chang B, Yu T, Han A. MEMS micro-coils for magnetic neurostimulation. Biosensors And Bioelectronics 2023, 227: 115143. PMID: 36805270, DOI: 10.1016/j.bios.2023.115143.Peer-Reviewed Original ResearchConceptsMEMS fabrication processHigh power efficiencyPhysical vapor depositionDRIE processThick metal filmSOI waferALD aluminaFabrication processParylene CCoil resistanceDevice fabricationProcess technologyLithography stepAl wireProbe fabricationMask fabricationPower efficiencyVapor depositionMetal filmsHigh conductivityLeak resistanceFabricationDesign changesCoil deviceMaskless photolithography