MEMS micro-coils for magnetic neurostimulation
Liu X, Whalen A, Ryu S, Lee S, Fried S, Kim K, Cai C, Lauritzen M, Bertram N, Chang B, Yu T, Han A. MEMS micro-coils for magnetic neurostimulation. Biosensors And Bioelectronics 2023, 227: 115143. PMID: 36805270, DOI: 10.1016/j.bios.2023.115143.Peer-Reviewed Original ResearchMeSH KeywordsAnimalsBiosensing TechniquesBrainElectric ConductivityMetalsMiceMicro-Electrical-Mechanical SystemsConceptsMEMS fabrication processHigh power efficiencyPhysical vapor depositionDRIE processThick metal filmSOI waferALD aluminaFabrication processParylene CCoil resistanceDevice fabricationProcess technologyLithography stepAl wireProbe fabricationMask fabricationPower efficiencyVapor depositionMetal filmsHigh conductivityLeak resistanceFabricationDesign changesCoil deviceMaskless photolithography