Nanoindentation mechanical studies of bulk AlN single crystals with different orientations
Zhou H, Chen K, Gao X, Zheng S, Zeng X, Wang C, Wang Y, Pan Y, Xu K. Nanoindentation mechanical studies of bulk AlN single crystals with different orientations. Semiconductor Science And Technology 2024, 40: 015008. DOI: 10.1088/1361-6641/ad98b8.Peer-Reviewed Original ResearchIndentation depthYoung's modulusPhysical vapor transportIncreasing indentation depthIndentation size effectNano-mechanical testingLuminescence quenchingSmall Young's modulusCrystal planesSingle crystalsCrystal substratesRaman spectroscopyMechanical propertiesPanchromatic CL imagesLocal stressAlN single crystalsSurface morphologyMechanism studyAluminum nitrideProperties of AlNSlip regionCrystalIndentationStructural defectsModulus