Molecular Lithography on Silicon Wafers Guided by Porous, Extended Arrays of Small DNA Tiles
Mao D, Liu L, Zhang C, Liu H, Mao C. Molecular Lithography on Silicon Wafers Guided by Porous, Extended Arrays of Small DNA Tiles. Langmuir 2023, 39: 11782-11787. PMID: 37562139, DOI: 10.1021/acs.langmuir.3c01422.Peer-Reviewed Original ResearchConceptsE-beam lithographyDNA nanostructuresCost-effective fabrication methodSilicon wafersDNA origami structuresTile-based DNAMolecular lithographyCorresponding nanostructuresFabrication methodSmall DNA tilesNanostructuresFeature sizeLithographyOrigami structuresHF etchingDNA tilesWafersExtended arrayArrayLarge areasEtchingHereinSerial methodTemplateSize